{"id":2475,"date":"2008-05-01T20:47:49","date_gmt":"2008-05-01T20:47:49","guid":{"rendered":"http:\/\/casgroups.case.edu\/physics-senior-projects\/?p=2475"},"modified":"2016-06-20T14:11:46","modified_gmt":"2016-06-20T14:11:46","slug":"mems-resonators-for-high-temperature-applications","status":"publish","type":"post","link":"https:\/\/casgroups.case.edu\/physics-senior-projects\/mems-resonators-for-high-temperature-applications\/","title":{"rendered":"MEMS Resonators for High-Temperature Applications"},"content":{"rendered":"<h3 style=\"text-align: center\">Karen Vaughn with Prof. Mehran Mehregany (Dept. of EECS)<\/h3>\n<h3 style=\"text-align: center\"><a href=\"\/physics-senior-projects\/files\/2008\/05\/KarenVaughnPoster.pdf\">MEMS Resonators for High-Temperature Applications<\/a><\/h3>\n<p style=\"text-align: left\">Microelectromechanical systems (MEMS) resonators are used in a variety of devices to act as a frequency reference, and, in some applications, frequency stability is required for temperatures well above 300\u00b0C. \u00a0It is hypothesized that silicon carbide (SiC) resonators would perform better under such conditions than would polysilicon resonators. \u00a0To test this, a few different MEMS resonator geometries will be designed and fabricated using both polysilicon and silicon carbide.\u00a0 Various physical properties of these resonators will then be characterized, with emphasis on their frequency stability as a function of temperature. \u00a0The polysilicon and SiC versions of each resonator geometry will then be compared to determine the possible advantages of SiC in high-temperature applications.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Karen Vaughn with Prof. Mehran Mehregany (Dept. of EECS)<a href=\"\/physics-senior-projects\/files\/2008\/05\/KarenVaughnPoster.pdf\">MEMS Resonators for High-Temperature Applications<\/a><\/p>\n<p style=\"text-align: left\">Microelectromechanical systems (MEMS) resonators are used in a variety of devices to act as a frequency reference, and, in some applications, frequency stability is required for temperatures well above 300\u00b0C. \u00a0It is hypothesized that silicon carbide (SiC) resonators would perform better under such conditions than would polysilicon resonators. \u00a0To test this, a few different MEMS resonator geometries will be designed and fabricated using both polysilicon and silicon carbide.\u00a0 Various physical properties of these resonators will then be characterized, with emphasis on their frequency stability as a function of temperature. \u00a0<\/p>\n<p><a href=\"https:\/\/casgroups.case.edu\/physics-senior-projects\/mems-resonators-for-high-temperature-applications\/\" class=\"more-link\">Continue reading&#8230; <span class=\"screen-reader-text\">MEMS Resonators for High-Temperature Applications<\/span><\/a><\/p>\n","protected":false},"author":19,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"spay_email":""},"categories":[82,41],"tags":[],"jetpack_featured_media_url":"","_links":{"self":[{"href":"https:\/\/casgroups.case.edu\/physics-senior-projects\/wp-json\/wp\/v2\/posts\/2475"}],"collection":[{"href":"https:\/\/casgroups.case.edu\/physics-senior-projects\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/casgroups.case.edu\/physics-senior-projects\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/casgroups.case.edu\/physics-senior-projects\/wp-json\/wp\/v2\/users\/19"}],"replies":[{"embeddable":true,"href":"https:\/\/casgroups.case.edu\/physics-senior-projects\/wp-json\/wp\/v2\/comments?post=2475"}],"version-history":[{"count":2,"href":"https:\/\/casgroups.case.edu\/physics-senior-projects\/wp-json\/wp\/v2\/posts\/2475\/revisions"}],"predecessor-version":[{"id":2674,"href":"https:\/\/casgroups.case.edu\/physics-senior-projects\/wp-json\/wp\/v2\/posts\/2475\/revisions\/2674"}],"wp:attachment":[{"href":"https:\/\/casgroups.case.edu\/physics-senior-projects\/wp-json\/wp\/v2\/media?parent=2475"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/casgroups.case.edu\/physics-senior-projects\/wp-json\/wp\/v2\/categories?post=2475"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/casgroups.case.edu\/physics-senior-projects\/wp-json\/wp\/v2\/tags?post=2475"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}