Justin Thrall with Dr. Christian Zorman (Electrical Engineering)

Evaluation of MEMS-based Micromechanical Resonators

Research into the use MEMS technology in harsh environments has shown that current silicon-based MEMS devices are not as strong as desired. Silicon carbide based structures may have the strength to survive where ordinary silicon MEMS cannot. The quality factor and Young’s modulus of SiC-based resonators will be explored, as compared to Si-based resonators. Additionally, the behavior of the modulus and the quality factor will be investigated over temperatures ranging from room temperature to those in excess of 600 °C. These resonators will then be tested in different environments and their feasibility in sensor applications for harsh environments will be explored.